Pattern Modification with a Preferred Position Function

ABSTRACT

A method for pattern modification for making an integrated circuit layout is disclosed. The method includes determining a feature within a pattern of the integrated circuit layout that can be rearranged; determining a range in which the feature can be repositioned; for the feature, determining a preferred position function that exhibits extreme values at preferable positions; and rearranging the position of the feature within the range to match an extreme value of the function.

This patent claims the benefit of U.S. Ser. No. 61/792,179 filed Mar.15, 2013 and U.S. Ser. No. 61/785,302 filed Mar. 14, 2013, thedisclosures of which are hereby incorporated by reference.

BACKGROUND

Integrated circuits include complex circuitry formed through variousfeatures in a semiconductor substrate. To design such circuits, thedesired functionality is transformed into a design layout, in which eachfeature within the circuit for a particular layout is laid out so thatthe desired functionality may be achieved. In some cases, there isflexibility regarding the positioning of various features within thelayout.

For example, some photolithographic techniques involve the use of both amain pattern and a cut pattern to form a target pattern. The cut patternremoves portions of features formed by the main pattern in order toachieve the desired target pattern. For example, cut patterns can beused to split main patterns into smaller features to create the desiredpatterns. Using such techniques provides certain advantages to thephotolithographic process. For example, it is desirable to have a largeprocess window. The process window refers to the range of focus andexposure settings that will still produce the desired features into thephoto-resist layer. A process window can be improved by keeping featureswithin a pattern to be uniform in density. This may involve placement of“dummy” features. Dummy features are extra features that are placedwithin the main pattern in order to maintain feature density but do notserve any function within the circuit for which the pattern is designed.Cut features can also be used to separate dummy features from functionalfeatures. However, in some cases the cut features may be repositionedwithin a particular range and the circuitry will still function asdesired.

In a further example, vias are often used to connect a metal featurefrom a first metal layer to a metal feature from a second metal layer.In some cases, the vias must be placed at a precise location in order tomake the desired connection. In other cases, however, the vias may movewithin a defined region and still make the desired connection betweenmetal layers.

It can be beneficial to consider the placement of certain features ofcertain patterns for energy efficient purposes. Specifically, theplacement of certain features, such as vias in a via pattern or cutfeatures in a cut pattern, can have an effect on the efficiency offorming those patterns. Thus, it is desirable to have methods fordetermining optimal placement of such features.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1A is a diagram showing an illustrative top view of a via patternwith respect to other patterns, according to one example of principlesdescribed herein.

FIG. 1B is a diagram showing an illustrative adjustment of via positionto optimize layout for efficiency purposes, according to one example ofprinciples described herein.

FIG. 2A is a diagram showing an illustrative cut pattern with respect toa main pattern, according to one example of principles described herein.

FIG. 2B is a diagram showing an illustrative adjustment of cut featureswithin the cut pattern to optimize the layout for efficiency purposes,according to one example of principles described herein.

FIGS. 3A-3B are diagrams showing an illustrative adjustment of featureswithin a defined range, according to one example of principles describedherein.

FIG. 4 is a graph showing an illustrative function that relates positionof features to efficiency of forming the features, according to oneexample of principles described herein.

FIG. 5 is a diagram showing an illustrative placement of a cut featurewith respect to a via, according to one example of principles describedherein.

FIG. 6 is a graph showing an illustrative function that relates positionof a cut feature with respect to a via to efficiency of forming the cutfeature, according to one example of principles described herein.

FIG. 7 is a diagram showing an illustrative computing system that may beused to optimize a main pattern and a cut pattern, according to oneexample of principles described herein.

FIG. 8 is a flowchart showing an illustrative method for optimizingpositions of features within a pattern, according to one example ofprinciples described herein.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the disclosure. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Moreover,the performance of a first process before a second process in thedescription that follows may include embodiments in which the secondprocess is performed immediately after the first process, and may alsoinclude embodiments in which additional processes may be performedbetween the first and second processes. Various features may bearbitrarily drawn in different scales for the sake of simplicity andclarity. Furthermore, the formation of a first feature over or on asecond feature in the description that follows may include embodimentsin which the first and second features are formed in direct contact, andmay also include embodiments in which additional features may be formedbetween the first and second features, such that the first and secondfeatures may not be in direct contact.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. For example, if the device in the figures is turned over,elements described as being “below” or “beneath” other elements orfeatures would then be oriented “above” the other elements or features.Thus, the exemplary term “below” can encompass both an orientation ofabove and below. The apparatus may be otherwise oriented (rotated 90degrees or at other orientations) and the spatially relative descriptorsused herein may likewise be interpreted accordingly.

FIG. 1A is a diagram showing an illustrative top view 100 of a viapattern with respect to other patterns. Vias 106 are often used toconnect metal features from one metal layer 102 to metal features of adifferent metal layer 104. In some cases, a via 106 is limited by theoverlap of the metal layers. For example, vias 106-1, 106-2, and 106-4are limited in their placement because the underlying metal features areas narrow as the via itself.

In some cases, a via 106-3 may have a range 114 in which it can berepositioned without adversely affecting the function of the circuit forwhich the pattern is designed. Specifically, the via 106-3 may berepositioned within the region 114 and still maintain a sufficientelectrical connection between the first metal layer 102 and the secondmetal layer 104. Thus, if a repositioning of the via 106-3 would bebeneficial, it would be useful to reposition the via 106-3 accordingly.

As illustrated, the distances 108, 110, 112 between the vias 106 vary.In some examples, it may be useful to move the vias so that thedistances between each of the vias is an integer multiple of a singledistance. This can be useful when exposing the via layer through aphoto-mask. Specifically, if the features within the photo-mask are allan integer multiple of a specific distance, then the process window canbe increased. Thus, there can be more tolerance in the focus andexposure settings of the photolithography tool used to expose aphoto-resist layer through the photo-mask.

A function can be defined to relate the position of features with anindex and the function can be used to determine the position offeatures, such as by minimizing the index. Thus, the function may bereferred to as a preferred position function. The preferred positionfunction can be designed for a variety of situations as will bediscussed in further detail below. In this example, the preferredposition function indicates that features (i.e., vias) should berepositioned so that they are within distances from each other that arean integer multiple of a specified distance.

As a comparison for better understanding, the preferred positionfunction is similar to a potential energy function of a physics system.The physics system is stable when the potential energy is minimized. Inthe present disclosure, the position of features is optimized when thepreferred position function is minimized. The index is comparable to thepotential energy. The method to reposition various features in anintegrated circuit layout using the preferred position function isdescribed in detail according to various embodiments.

FIG. 1B is a diagram showing an illustrative adjustment of via positionto optimize layout for efficiency purposes. According to the presentexample, the distance 108 between the first via 106-1 and the second via106-2 represents the specified distance. Because the third via 106-3 hasbeen repositioned according to the preferred position function, thedistance 110 between the second via 106-2 and the third via 106-3 is thesame as the specified distance. Additionally, the distance 112 betweenthe third via 106-3 and the fourth via 106-4 is twice the specifieddistance, and thus an integer multiple of the specified distance. Insome cases, this specified distance may be the minimum pitch defined bydesign specifications.

FIG. 2A is a diagram showing an illustrative cut pattern 200 withrespect to a main pattern 202. According to certain illustrativeexamples, a preferred position function can be used to reposition cutfeatures 204 with respect to a main pattern 202. In some cases, apattern layout may be formed by using a main pattern 202 and a cutpattern 200. The main pattern 202 is designed to be formed for betterlithography performance, such as a larger process window, a longer depthof focus, or a higher contrast. Thus, the main feature 202 may includeextra features, referred to as redundancy features. Moreover, the mainpattern 202 may connect lines that are not intended to be connected. Tosever these lines, or separate redundancy features from functionalfeatures, a cut pattern 200 is used. The cut pattern 200 includes anumber of cut features 204 that “cut” the features formed by the mainpattern.

The cut features 204 may have a range along the main pattern 202 inwhich they can be repositioned without adversely affecting the desiredcircuit functionality. Thus, a preferred position function may be usedto determine how to reposition the cut features 204 in a preferablemanner. This may be done within the constraints of the ranges in whichthey may be moved.

FIG. 2B is a diagram showing an illustrative adjustment 210 of cutfeatures within the cut pattern to optimize the layout for efficiencypurposes. According to the present example, the cut features 204 havebeen repositioned so that distances 206 between them are an integermultiple of a specified distance. The following table provides anexample of the distances between features before and after repositioningaccording to the preferred position function. The specified distance isdefined as SD.

TABLE 1 Before After Distance Reposition Reposition D1 SD SD D2 1.4 * SD1.0 * SD D3 2.6 * SD 2.2 * SD D4 1.4 * SD 1.1 * SD D5 1.2 * SD 1.1 * SDD6 1.2 * SD 1.0 * SD D7 1.2 * SD 1.1 * SD D8 1.6 * SD 2.0 * SD

According to the present example, the distances between cut features 204after repositioning are close to an integer multiple of the specifieddistance. In some cases, it may not be possible to move every feature toa precise integer multiple. Thus, a tolerance level may be defined. Forexample, a tolerance level of 5%, 7%, 10%, 15%, or 20% may be used.Other tolerance levels may be used as well. In the present example, atolerance level of 10% is used. Thus, it is acceptable if a distance iswithin 9.9-1.1, 1.8-2.2, or 2.7-3.3 times the specified distance.

A device formed using principles described herein will have specificunique characteristics. Specifically, forming a semiconductor circuitwith main patterns and cut patterns causes the features within thecircuitry to have certain characteristics. For example, various lineends will have edges that indicate they were formed with a cut feature.Moreover, each of the cut feature locations will have distances fromeach other that are close to an integer multiple of a specifieddistance. In some cases, the specified distance may be the minimum pitchfor the layer of the pattern formed with the cut features.

FIGS. 3A-3B are diagrams showing an illustrative adjustment of featureswithin a defined range. FIG. 3A illustrates a number of features 304.Each feature can be repositioned along a range 302. In this example, therange 302 is a straight line. Thus, the features 304 can only move in asingle direction.

FIG. 3B illustrates the features 304 after they have been repositionedaccording to a preferred position function (such as the preferredposition function in FIG. 4). Specifically, the first feature 304-1 hasbeen moved to the left. Additionally, the second feature 304-2 has beenmoved to the left. The distance between the first feature 304-1 and thesecond feature 304-2 represents the specified distance and remains thesame through the repositioning. The third feature 304-3, however, hasbeen moved in the opposite direction. The distance between the secondfeature 304-2 and the third feature 304-3 is now twice the specifieddistance. Thus, these features can be formed lower potential energy bythe photolithography system.

FIG. 4 is a graph 400 showing an illustrative preferred positionfunction that relates position of features to the preferable nature ofthose positions. According to the present example, the horizontal axis404 represents distance from a particular feature, with zero being thecomplete overlap of two features. The vertical axis 402 represents avalue that indicates the preferable nature of the position. This will bereferred to as the preference value.

In one example, the preferable nature may be modeled using a potentialenergy function. The preferable nature may be associated with the lowestpotential energy. Thus, a lower value indicates a more preferableposition. In this case, the preferred position function 406 includes twolow points. The low points are extreme values along the function. Eachextreme value corresponds to an integer multiple of a specific distancebecause this function is designed to indicate the preferable nature ofplacing features within distances from each other that are integermultiples of a specified distance. Thus, both the first point 408 andthe second point 410 represent distances at which placement of a featureis preferred.

Using the features of FIG. 3 as an example, the distance between thefirst feature 304-1 and the second feature 304-2 may correspond to thefirst point 408 on the graph 400. Specifically, the position of thefirst feature 304-1 corresponds to zero on the horizontal axis 404 andthe second feature 304-2 corresponds to the first point 408. Thedistance between the second feature 304-2 and the third feature 304-3may correspond to the second point 410 on the graph 400. Specifically,the position of the second feature 304-2 corresponds to zero on thehorizontal axis 404 and the third feature 304-3 corresponds to thesecond point 410.

The preferred position function may be derived for a variety ofsituations. In some examples, the preferred position function may bedirectly defined in a mathematic formula. In other cases, the functionmay be expressed in a curve as illustrated in FIG. 4. The preferredposition function can be constructed according to various rules andfactors, which may be extracted from the manufacturing data. Forexample, one factor is the minimum pitch for a particular pattern. Inanother example where a forbidden zone is defined to present a minimumdistance between features, the corresponding preferred position functiongoes substantially high or infinite when the distance approaches theminimum distance. In some examples, the preferred position function mayrelate preferable positions to a two dimensional pattern. Thus, thepreference value of a single point will be a function of a position inan x-direction and a position in a y-direction. The preferred positionfunction may factor in a variety of characteristics. In some cases, thepreferred position function may factor in the characteristics of thefeatures themselves. For example, if the features are round, then theideal distance between features may be different than if the featureswere square. Moreover, the preferred position function may factor thedistances between other types of features in addition to similar typesof features.

FIG. 5 is a diagram showing an illustrative placement 500 of a cutfeature 508 with respect to vias 504, 514. One example of a case wherethe preferred position function may factor in the position of anothertype of feature is the case where a cut feature 508 is positioned basedon the location of vias 504, 514. In general, it is preferable to havecut features as far away from vias as possible. Thus, a customizedpreferred position function can be designed to do so.

For example, a cut feature 508 may be positioned along a main feature506 between two vias 504, 514. Each via may have a keep-out zone 502,512 associated with it. The keep-out zone 502, 512 represents a regionwhere the cut feature must not be placed. It may be possible for the cutfeature 508 to be placed anywhere between the two keep-out zones 502,512 without touching them.

In some examples, the preferred position function for each via 504, 514may be different. Thus, the ideal location of the cut feature 508 maynot be in the precise middle between the two vias 504, 514.Specifically, the distance 510 between the cut feature 508 and the firstvia 504 may be different than the distance 516 between the cut feature508 and the second via 514.

FIG. 6 is a graph showing an illustrative preferred position functionthat relates position of a cut feature with respect to a via toefficiency of forming the cut feature. According to the present example,the horizontal axis 604 represents distance from a particular feature,with zero being the complete overlap of two features. The vertical axis602 represents the preference value. Again, the preferred positionfunction is based on a potential energy function. Thus, the lower thepreference value, the more tendentious to place a feature at thatdistance will be.

From zero to a certain point, the graph 600 indicates the keep-out zone608. Thus, the cut feature cannot be positioned anywhere within thisdistance. As the distance from zero increases, the preference value goeslower. Thus, it is more desirable to put the cut feature farther fromthe via than closer.

In other example, the preferred position function includes a pluralityvariables associated with the positions of a plurality of features,respectively. By minimizing the preferred position function, thefeatures are repositioned.

FIG. 7 is a diagram showing an illustrative computing system that may beused to optimize a main pattern and a cut pattern. According to certainillustrative examples, the physical computing system 700 includes amemory 702 having modeling software 704 and data 706 stored thereon. Thephysical computing system 700 also includes a processor 708 and a userinterface 710.

There are many types of memory available. Some types of memory, such assolid state drives, are designed for storage. These types of memorytypically have large storage volume but relatively slow performance.Other types of memory, such as those used for Random Access Memory(RAM), are optimized for speed and are often referred to as “workingmemory.” The various forms of memory may store information in the formof software 704 and data 706.

The physical computing system 700 also includes a processor 708 forexecuting the software 704 and using or updating the data 706 stored inmemory 702. In addition to storing the modeling software 704, the memory702 may store an operating system. An operating system allows otherapplications to interact properly with the hardware of the physicalcomputing system. The layout software 704 may include the tools to formfinal pattern layouts as well as main pattern layouts and cut patternlayouts.

A user interface 710 may provide a means for a user 712 to interact withthe system. The user may use various tools such as a keyboard or a mouseto input information into the physical computing system. Additionally,various output devices such as a monitor may be used to provideinformation to the user 712.

FIG. 8 is a flowchart showing an illustrative method for optimizingfeatures within pattern. According to certain illustrative examples, themethod includes a step for determining 802 a range in a feature within apattern can be rearranged. At this step, each feature is determined tohave an allowable position range.

The method further includes a step for determining 804 a function thatrelates position of the feature to a process efficiency of forming thefeature. In the present embodiment, the function (the preferred positionfunction) is determined based on the range of a feature. The functionmay be determined additionally based on other factors. For example, eachextreme value in the function corresponds to an integer multiple of aspecific distance that indicates the preferable nature of placingfeatures within distances from each other that are integer multiples ofa specified distance.

The method further includes a step for rearranging 806 a position of thefeature within the range to optimize the process efficiency of formingthe feature. At this step, by minimizing the function, the preferredposition of the feature is determined. Accordingly, the feature isrearranged to the preferred position.

According to certain illustrative examples, a method for patternmodification includes determining a range in a feature within a patterncan be rearranged, determining a function that relates position of thefeature to a process efficiency of forming the feature, and rearranginga position of the feature within the range to optimize the processefficiency of forming the feature.

According to certain illustrative examples, a computing system forpattern optimization includes a processor and a memory. The memoryincludes computer readable instructions that when executed by theprocessor, cause the processor to determine ranges in which featureswithin a pattern can be rearranged, determine a function that relatesposition of the features to a process efficiency of forming thefeatures, and rearrange positions of the feature within the ranges tooptimize the process efficiency of forming the features.

According to certain illustrative examples, a device includes circuitryhaving layers formed through main patterns and corresponding cutpatterns. The cut features of the cut pattern are positioned such thateach cut feature is within a defined tolerance range of integermultiples of a minimum distance from other cut features.

It is understood that various different combinations of the above-listedembodiments and steps can be used in various sequences or in parallel,and there is no particular step that is critical or required.Additionally, although the term

§electrode

” is used herein, it will be recognized that the term includes theconcept of an

§electrode contact.

” Furthermore, features illustrated and discussed above with respect tosome embodiments can be combined with features illustrated and discussedabove with respect to other embodiments. Accordingly, all suchmodifications are intended to be included within the scope of thisinvention.

The foregoing has outlined features of several embodiments. Those ofordinary skill in the art should appreciate that they may readily usethe present disclosure as a basis for designing or modifying otherprocesses and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those of ordinary skill in the art should also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they may make various changes,substitutions and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. A method for pattern modification for making anintegrated circuit layout, the method comprising: determining a featurewithin a pattern of the integrated circuit layout that can berearranged; determining a range in which the feature can berepositioned; for the feature, determining a preferred position functionthat exhibits extreme values at preferable positions; and rearrangingthe position of the feature within the range to match a value of thefunction.
 2. The method of claim 1, further comprising, determining arange in which additional features within the pattern can be rearranged.3. The method of claim 2, further comprising, determining additionalpreferred position functions for each of the additional features.
 4. Themethod of claim 3, further comprising, rearranging the additionalfeatures to optimize the positions of the additional features based onextreme values of the preferred position function.
 5. The method ofclaim 4, wherein the preferred position functions are such that whenfeatures are positioned to match extreme values of the function, thefeatures are positioned such that distances between the features arewithin a defined tolerance range of integer multiples of a specifieddistance.
 6. The method of claim 5, wherein the specified distance isthe minimum pitch of the pattern.
 7. The method of claim 1, wherein thepreferred position function is such that an extreme value corresponds toa position that is farther away from a different feature.
 8. The methodof claim 1, wherein the range is one of: along a line and within adefined two dimensional region.
 9. The method of claim 1, wherein thefeature comprises a cut feature within a cut pattern.
 10. The method ofclaim 1, wherein the feature comprises a via used to connect a metalfeature of a first metal layer with a metal feature of a second metallayer.
 11. A computing system for optimizing a pattern of an integratedcircuit layout, the system comprising: a processor; a memory comprisingcomputer readable instructions that when executed by the processor,cause the processor to: determine a set of features within a patternthat can be repositioned; determine ranges for each feature in which thefeatures can be repositioned; for each of the features, determinepreferred position functions that exhibit extreme values with preferablepositions with respect to a reference feature; and rearrange positionsof the features within the ranges to match a value of the function. 12.The system of claim 11, wherein the preferred position functions aresuch that when features are positioned to match extreme values of thefunction, the features are positioned such that distances between thefeatures are within a defined tolerance range of integer multiples of aspecified distance.
 13. The system of claim 12, wherein the specifieddistance is the minimum pitch of the pattern.
 14. The system of claim11, wherein the preferred position function is such that an extremevalue corresponds to a position that is farther away from a differentfeature.
 15. The system of claim 11, wherein one of the ranges is alonga line.
 16. The system of claim 11, wherein one of the ranges is withina defined two dimensional region.
 17. The system of claim 11, whereinthe feature comprises one of: a cut feature within a cut pattern and avia.
 18. A device comprising: circuitry having layers formed throughmultiple patterns; wherein the features of the patterns are positionedsuch that each cut feature is within a defined tolerance range ofinteger multiples of a specified distance from other features.
 19. Thedevice of claim 18, wherein the specified distance is the minimum pitchof the layer formed with the main pattern and cut pattern.
 20. Thedevice of claim 18, wherein the tolerance range is about 10 percent ofthe distance between features.